Chloride-Based CVD at High Growth Rates on 3” Vicinal Off-Angles SiC Wafers
Leone, Stefano; Henry, Anne; Kordina, Olle; Janzén, Erik
- 期刊名称Materials Science Forum
- 作者Leone, Stefano; Henry, Anne; Kordina, Olle; Janzén, Erik
- 电子ISSN1662-9752
- 文件大小486.39KB
- 发表时间2010-4
- DOI10.4028/www.scientific.net/MSF.645-648.107
- 页码107-110