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Design of a novel closed-loop SOI MEMS resonant electrostatic field sensor

Design of a novel closed-loop SOI MEMS resonant electrostatic field sensor

Chunrong Peng; Pengfei Yang; Haiyan Zhang; Xin Guo; Shanhong Xia

作者Chunrong Peng; Pengfei Yang; Haiyan Zhang; Xin Guo; Shanhong Xia
卷第5卷
印刷ISSN1877-7058
文件大小557.63KB
发表时间2010
DOI10.1016/j.proeng.2010.09.397
页码1482-1485

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