A method to determine the interface position and layer thickness in SIMS depth profiling of multilayer films
- 期刊名称Metrologia
- 作者Kim, Kyung Joong; Jang, Jong Shik; Moon, Dae Won; Kang, Hee Jae
- 卷第47卷
- 期第3期
- 印刷ISSN0026-1394
- 电子ISSN1681-7575
- 文件大小722.85KB
- 发表时间2010-06
- DOI10.1088/0026-1394/47/3/016
- 页码253-261
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