Atomic layer deposition of tantalum nitride based thin films from cyclopentadienyl type precursor

• 作者A. Correia Anacleto; A. Zauner; D. Cany-Canian; J. Gatineau; M.-C. Hugon
• 卷第519卷
• 期第1期
• 印刷ISSN0040-6090
• 文件大小819.90KB
• 发表时间2010
• DOI10.1016/j.tsf.2010.07.115
• 页码367-372