Fabrication and characterization of thermally actuated micromechanical resonators for airborne particle mass sensing: II. Device fabrication and characterization
Hajjam, Arash; Wilson, James C; Rahafrooz, Amir; Pourkamali, Siavash
- 期刊名称Journal of Micromechanics and Microengineering
- 作者Hajjam, Arash; Wilson, James C; Rahafrooz, Amir; Pourkamali, Siavash
- 卷第20卷
- 期第12期
- 印刷ISSN0960-1317
- 电子ISSN1361-6439
- 文件大小1545.33KB
- 发表时间2010-12-01
- DOI10.1088/0960-1317/20/12/125019