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Fabrication and characterization of thermally actuated micromechanical resonators for airborne particle mass sensing: II. Device fabrication and characterization

Fabrication and characterization of thermally actuated micromechanical resonators for airborne particle mass sensing: II. Device fabrication and characterization

Hajjam, Arash; Wilson, James C; Rahafrooz, Amir; Pourkamali, Siavash
  • 期刊名称Journal of Micromechanics and Microengineering
  • 作者Hajjam, Arash; Wilson, James C; Rahafrooz, Amir; Pourkamali, Siavash
  • 卷第20卷
  • 期第12期
  • 印刷ISSN0960-1317
  • 电子ISSN1361-6439
  • 文件大小1545.33KB
  • 发表时间2010-12-01
  • DOI10.1088/0960-1317/20/12/125019
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