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A comparative study on the structural properties and electrical characteristics of thin HoTi
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<sub/>x</sub></i>
O
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<sub/>y</sub></i>
, TmTi
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<sub/>x</sub></i>
O
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<sub/>y</sub></i>
and YbTi
<i>
<sub/>x</sub></i>
O
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<sub/>y</sub></i>
dielectrics

A comparative study on the structural properties and electrical characteristics of thin HoTi _x O _y , TmTi _x O _y and YbTi _x O _y dielectrics

Pan, Tung-Ming; Yen, Li-Chen; Wu, Xin-Chang

期刊名称Semiconductor Science and Technology
作者Pan, Tung-Ming; Yen, Li-Chen; Wu, Xin-Chang
卷第25卷
期第5期
印刷ISSN0268-1242
电子ISSN1361-6641
文件大小681.62KB
发表时间2010-05-01
DOI10.1088/0268-1242/25/5/055015

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