[IEEE Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) - Bordeaux, France (2010.04.26-2010.04.28)] 2010 11th International Thermal, Mechanical & Multi-Physics Simulation, and Experiments in Microelectronics and Microsystems (EuroSimE) - Two-scale vs three-scale FE analyses of shock-induced failure in polysilicon MEMS
- 作者Mariani, S.; Ghisi, A.; Martini, R.; Corigliano, A.; Simoni, B.
- 文件大小16619.89KB
- 发表时间2010
- DOI10.1109/ESIME.2010.5464588
- 页码1-7
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