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Lattice-size Dependence and Dynamics of Surface Mean Slope in a Thin Film Deposition Process

Lattice-size Dependence and Dynamics of Surface Mean Slope in a Thin Film Deposition Process

Huang, Jianqiao; Hu, Gangshi; Orkoulas, Gerassimos; Christofides, Panagiotis D.
  • 期刊名称IFAC Proceedings Volumes
  • 作者Huang, Jianqiao; Hu, Gangshi; Orkoulas, Gerassimos; Christofides, Panagiotis D.
  • 卷第43卷
  • 期第5期
  • 印刷ISSN1474-6670
  • 文件大小324.10KB
  • 发表时间2010
  • DOI10.3182/20100705-3-be-2011.00134
  • 页码811-816
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