Structural, optical and hydrophobic properties of sputter deposited zirconium oxynitride films

• 作者Sushant K. Rawal; Amit Kumar Chawla; Vipin Chawla; R. Jayaganthan; Ramesh Chandra
• 卷第172卷
• 期第3期
• 印刷ISSN0921-5107
• 文件大小586.72KB
• 发表时间2010
• DOI10.1016/j.mseb.2010.05.027
• 页码259-266