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Structural and optical investigation of sputter deposited hydrophobic chromium oxynitride films

Structural and optical investigation of sputter deposited hydrophobic chromium oxynitride films

Sushant K. Rawal; Amit Kumar Chawla; Vipin Chawla; R. Jayaganthan; Ramesh Chandra
  • 作者Sushant K. Rawal; Amit Kumar Chawla; Vipin Chawla; R. Jayaganthan; Ramesh Chandra
  • 卷第519卷
  • 期第22期
  • 印刷ISSN0040-6090
  • 文件大小1483.78KB
  • 发表时间2011
  • DOI10.1016/j.tsf.2011.05.056
  • 页码7686-7693
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