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Changes in electrical and structural properties of indium oxide thin films through post-deposition annealing

Changes in electrical and structural properties of indium oxide thin films through post-deposition annealing

Kazuhiro Kato; Hideo Omoto; Takao Tomioka; Atsushi Takamatsu

作者Kazuhiro Kato; Hideo Omoto; Takao Tomioka; Atsushi Takamatsu
卷第520卷
期第1期
印刷ISSN0040-6090
文件大小2120.38KB
发表时间2011
DOI10.1016/j.tsf.2011.06.061
页码110-116

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