Substrate temperature dependence of electrical and structural properties of Ru films
- 作者Takatoshi Nagano; Kazuya Inokuchi; Kunihiro Tamahashi; Nobuhiro Ishikawa; Yasushi Sasajima; Jin Onuki
- 卷第520卷
- 期第1期
- 印刷ISSN0040-6090
- 文件大小1088.40KB
- 发表时间2011
- DOI10.1016/j.tsf.2011.07.046
- 页码374-379