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A 1-D Capacitive Micromachined Ultrasonic Transducer Imaging Array Fabricated With a Silicon-Nitride-Based Fusion Process

A 1-D Capacitive Micromachined Ultrasonic Transducer Imaging Array Fabricated With a Silicon-Nitride-Based Fusion Process

Logan, A.S.; Wong, L.L.P.; Yeow, J.T.W.

作者Logan, A.S.; Wong, L.L.P.; Yeow, J.T.W.
卷第16卷
期第5期
印刷ISSN1083-4435
电子ISSN1941-014X
文件大小489.95KB
发表时间2011
DOI10.1109/tmech.2011.2159732
页码861-865

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