Seeding Atomic Layer Deposition of High-
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Dielectrics on Epitaxial Graphene with Organic Self-Assembled Monolayers

Seeding Atomic Layer Deposition of High- k Dielectrics on Epitaxial Graphene with Organic Self-Assembled Monolayers

Alaboson, Justice M. P.; Wang, Qing Hua; Emery, Jonathan D.; Lipson, Albert L.; Bedzyk, Michael J.; Elam, Jeffrey W.; Pellin, Michael J.; Hersam, Mark C.

期刊名称ACS Nano
作者Alaboson, Justice M. P.; Wang, Qing Hua; Emery, Jonathan D.; Lipson, Albert L.; Bedzyk, Michael J.; Elam, Jeffrey W.; Pellin, Michael J.; Hersam, Mark C.
卷第5卷
期第6期
印刷ISSN1936-0851
电子ISSN1936-086X
文件大小4027.99KB
发表时间2011-06-28
DOI10.1021/nn201414d
页码5223-5232

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Seeding Atomic Layer Deposition of High- k Dielectrics on Epitaxial Graphene with Organic Self-Assembled Monolayers