Reducing Stacking Faults in Highly Doped N-Type 4H-SiC Crystal

Kojima, Kazutoshi; Kato, Tomohisa; Ito, Sachiko; Kojima, Jun; Hirose, Fusao; Kito, Yasuo; Yamauchi, Shoichi; Nishikawa, K.; Adachi, Ayumu

期刊名称Materials Science Forum
作者Kojima, Kazutoshi; Kato, Tomohisa; Ito, Sachiko; Kojima, Jun; Hirose, Fusao; Kito, Yasuo; Yamauchi, Shoichi; Nishikawa, K.; Adachi, Ayumu
电子ISSN1662-9752
文件大小874.62KB
发表时间2011-3
DOI10.4028/www.scientific.net/MSF.679-680.8
页码8-11

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