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[IEEE 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS) - Cancun, Mexico (2011.01.23-2011.01.27)] 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems - Active self-Q-enhancement in high frequency thermally actuated M/NEMS resonators

[IEEE 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS) - Cancun, Mexico (2011.01.23-2011.01.27)] 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems - Active self-Q-enhancement in high frequency thermally actuated M/NEMS resonators

Rahafrooz, Amir; Pourkamali, Siavash

作者Rahafrooz, Amir; Pourkamali, Siavash
文件大小1172.42KB
发表时间2011
DOI10.1109/MEMSYS.2011.5734536
页码760-763

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