Fabrication of fluorine-terminated diamond-like carbon thin film using a hyperthermal atomic fluorine beam

• 期刊名称Diamond and Related Materials
• 作者Kanda, Kazuhiro; Yamada, Noriko; Yokota, Kumiko; Tagawa, Masahito; Niibe, Masahito; Okada, Makoto; Haruyama, Yuichi; Matsui, Shinji
• 卷第20卷
• 印刷ISSN0925-9635
• 文件大小401.41KB
• 发表时间2011-5
• DOI10.1016/j.diamond.2011.03.010
• 页码703-706