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Electrically Benign Ru Wet Etching Method for Fabricating Ru∕TiO[sub 2]∕Ru Capacitor

Lee, Sang Young; Kim, Seong Keun; Kim, Kyung Min; Choi, Gyu-Jin; Han, Jeong Hwan; Hwang, Cheol Seong

期刊名称Journal of The Electrochemical Society
作者Lee, Sang Young; Kim, Seong Keun; Kim, Kyung Min; Choi, Gyu-Jin; Han, Jeong Hwan; Hwang, Cheol Seong
卷第158卷
期第3期
印刷ISSN0013-4651
文件大小300.93KB
发表时间2011
DOI10.1149/1.3530789