A model for squeeze-film damping of perforated MEMS devices in the free molecular regime
- 期刊名称Journal of Micromechanics and Microengineering
- 作者Li, Pu; Hu, Rufu
- 卷第21卷
- 期第2期
- 印刷ISSN0960-1317
- 电子ISSN1361-6439
- 文件大小407.63KB
- 发表时间2011-02-01
- DOI10.1088/0960-1317/21/2/025006
EditorialJournal of Environmental Science and Health . Part A: Environmental Science and Engineering and Toxicology · 1991
Book reviewGrob, Robert L. · Journal of Environmental Science and Health . Part A: Environmental Science and Engineering and Toxicology · 1993
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Knowledge and regulationLibby, W.F. · Journal of Environmental Science and Health . Part A: Environmental Science and Engineering · 1979
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