Characteristics of high Al content AlGaN grown by pulsed atomic layer epitaxy

• 作者Xu Pan; Xiaoliang Wang; Hongling Xiao; Cuimei Wang; Cuibai Yang; Wei Li; Weiying Wang; Peng Jin; Zhanguo Wang
• 卷第257卷
• 期第20期
• 印刷ISSN0169-4332
• 文件大小549.20KB
• 发表时间2011
• DOI10.1016/j.apsusc.2011.05.055
• 页码8718-8721