Design and achievement of a complete bottom-up electroless copper filling for sub-micrometer trenches
- 作者Zhifeng Yang; Xu Wang; Na Li; Zhixiang Wang; Zenglin Wang
- 卷第56卷
- 期第9期
- 印刷ISSN0013-4686
- 文件大小545.33KB
- 发表时间2011
- DOI10.1016/j.electacta.2011.01.022
- 页码3317-3321
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