Subwavelength lithography by waveguide mode interference
Wang, Bing; Bian Chew, Ah; Teng, Jinghua; Si, Guangyuan; Danner, Aaron J.
- 期刊名称Applied Physics Letters
- 作者Wang, Bing; Bian Chew, Ah; Teng, Jinghua; Si, Guangyuan; Danner, Aaron J.
- 卷第99卷
- 期第15期
- 印刷ISSN0003-6951
- 文件大小1212.00KB
- 发表时间2011
- DOI10.1063/1.3651274