Combining nanoimprint lithography and a molecular weight selective thermal reflow for the generation of mixed 3D structures
- 期刊名称Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- 作者Schleunitz, Arne; Spreu, Christian; Vogler, Marko; Atasoy, Hakan; Schift, Helmut
- 卷第29卷
- 期第6期
- 印刷ISSN1071-1023
- 文件大小909.29KB
- 发表时间2011
- DOI10.1116/1.3643761
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