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Shape control of polymer reflow structures fabricated by nanoimprint lithography

Shape control of polymer reflow structures fabricated by nanoimprint lithography

Helmut Schift; Christian Spreu; Arne Schleunitz; JaeJong Lee

作者Helmut Schift; Christian Spreu; Arne Schleunitz; JaeJong Lee
卷第88卷
期第1期
印刷ISSN0167-9317
文件大小788.05KB
发表时间2011
DOI10.1016/j.mee.2010.08.029
页码87-92

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