Fabrication of 3D patterns with vertical and sloped sidewalls by grayscale electron-beam lithography and thermal annealing

• 作者Arne Schleunitz; Helmut Schift
• 卷第88卷
• 期第8期
• 印刷ISSN0167-9317
• 文件大小434.32KB
• 发表时间2011
• DOI10.1016/j.mee.2010.12.046
• 页码2736-2739