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Fabrication and Performance of Piezoelectric MEMS Generators Using Bulk PZT Films

Tang, Gang; Liu, Jing Quan; Liu, He Sheng; Li, Yi Gui; Yang, Chun Sheng; He, Dan Nong

期刊名称Key Engineering Materials
作者Tang, Gang; Liu, Jing Quan; Liu, He Sheng; Li, Yi Gui; Yang, Chun Sheng; He, Dan Nong
卷第483卷
电子ISSN1662-9795
文件大小2147.72KB
发表时间2011-6
DOI10.4028/www.scientific.net/KEM.483.607
页码607-610