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Enhancement of Sensitivity for the Evaluation of Electrical Properties by Modifying the Nano Structure of Microwave AFM Probe

Enhancement of Sensitivity for the Evaluation of Electrical Properties by Modifying the Nano Structure of Microwave AFM Probe

Zhang, Lan; Ju, Yang; Hosoi, Atsushi; Fujimoto, Akifumi

期刊名称Materials Science Forum
作者Zhang, Lan; Ju, Yang; Hosoi, Atsushi; Fujimoto, Akifumi
电子ISSN1662-9752
文件大小2384.36KB
发表时间2011-2
DOI10.4028/www.scientific.net/MSF.675-677.555
页码555-558

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