High-throughput characterization of film thickness in thin film materials libraries by digital holographic microscopy
- 期刊名称Science and Technology of Advanced Materials
- 作者Lai, Yiu Wai; Krause, Michael; Savan, Alan; Thienhaus, Sigurd; Koukourakis, Nektarios; Hofmann, Martin R; Ludwig, Alfred
- 卷第12卷
- 期第5期
- 印刷ISSN1468-6996
- 电子ISSN1878-5514
- 文件大小1075.52KB
- 发表时间2011-10-01
- DOI10.1088/1468-6996/12/5/054201
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