[MEMS Reference Shelf] MEMS Reliability || Testing and Standards for Qualification
Hartzell, Allyson L.; da Silva, Mark G.; Shea, Herbert R.
- 作者Hartzell, Allyson L.; da Silva, Mark G.; Shea, Herbert R.
- 文件大小1896.54KB
- 发表时间2011
- DOI10.1007/978-1-4419-6018-4_6
- 页码215-252