SPIE Proceedings [SPIE SPIE Defense, Security, and Sensing - Orlando, Florida, United States (Monday 25 April 2011)] Scanning Microscopies 2011: Advanced Microscopy Technologies for Defense, Homeland Security, Forensic, Life, Environmental, and Industrial Sciences - Study of a large range metrological atomic force microscope applied for calibration of a vertical PZT stage
- 作者Postek, Michael T.; Wang, S. H.; Tan, S. L.; Newbury, Dale E.; Platek, S. Frank; Xu, G.; Joy, David C.; Maugel, Tim K.
- 卷第8036卷
- 印刷ISSN0277-786X
- 文件大小10378.28KB
- 发表时间2011
- DOI10.1117/12.883334
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