发现好书期刊，享受阅读乐趣

海量图书期刊资源，随时随地畅享阅读乐趣

Piezoelectric MEMS generator based on the bulk PZT/silicon wafer bonding technique

Gang Tang; Jing-quan Liu; He-sheng Liu; Yi-gui Li; Chun-sheng Yang; Dan-nong He; Viet DzungDao; Katsuhiko Tanaka; Susumu Sugiyama

作者Gang Tang; Jing-quan Liu; He-sheng Liu; Yi-gui Li; Chun-sheng Yang; Dan-nong He; Viet DzungDao; Katsuhiko Tanaka; Susumu Sugiyama
卷第208卷
期第12期
印刷ISSN1862-6319
文件大小643.77KB
发表时间2011
DOI10.1002/pssa.201127186
页码2913-2919