Improved the Surface Roughness of Silicon Nanophotonic Devices by Thermal Oxidation Method
- 期刊名称Journal of Physics: Conference Series
- 作者Shi, Zujun; Shao, Shiqian; Wang, Yi
- 卷第276卷
- 电子ISSN1742-6596
- 文件大小537.96KB
- 发表时间2011-02-01
- DOI10.1088/1742-6596/276/1/012087
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