Toward atom probe tomography of microelectronic devices

Larson, D J; Lawrence, D; Lefebvre, W; Olson, D; Prosa, T J; Reinhard, D A; Ulfig, R M; Clifton, P H; Bunton, J H; Lenz, D; Olson, J D; Renaud, L; Martin, I; Kelly, T F

期刊名称Journal of Physics: Conference Series
作者Larson, D J; Lawrence, D; Lefebvre, W; Olson, D; Prosa, T J; Reinhard, D A; Ulfig, R M; Clifton, P H; Bunton, J H; Lenz, D; Olson, J D; Renaud, L; Martin, I; Kelly, T F
卷第326卷
电子ISSN1742-6596
文件大小3002.23KB
发表时间2011-11-09
DOI10.1088/1742-6596/326/1/012030

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Toward atom probe tomography of microelectronic devices