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Carbon Contamination Analysis and Its Effect on Extreme Ultra Violet Mask Imaging Performance Using Coherent Scattering Microscopy/<I>In-Situ</I> Accelerated Contamination System

Carbon Contamination Analysis and Its Effect on Extreme Ultra Violet Mask Imaging Performance Using Coherent Scattering Microscopy/In-Situ Accelerated Contamination System

Jeong, Chang Young; Lee, Sangsul; Doh, Jong Gul; Lee, Jae Uk; Cha, Han-Sun; Nichols, William T.; Lee, Dong Gun; Kim, Seong Sue; Cho, Han Ku; Rah, Seung-Yu; Ahn, Jinho
  • 期刊名称Journal of Nanoscience and Nanotechnology
  • 作者Jeong, Chang Young; Lee, Sangsul; Doh, Jong Gul; Lee, Jae Uk; Cha, Han-Sun; Nichols, William T.; Lee, Dong Gun; Kim, Seong Sue; Cho, Han Ku; Rah, Seung-Yu; Ahn, Jinho
  • 卷第11卷
  • 期第7期
  • 印刷ISSN1533-4880
  • 电子ISSN1533-4899
  • 文件大小1948.84KB
  • 发表时间2011-07-01
  • DOI10.1166/jnn.2011.4361
  • 页码5717-5722
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