Characterization of MEMS Devices for the Study of

M. González; P. Bhupathi; B. H. Moon; P. Zheng; G. Ling; E. Garcell; H. B. Chan; Y. Lee

作者M. González; P. Bhupathi; B. H. Moon; P. Zheng; G. Ling; E. Garcell; H. B. Chan; Y. Lee
卷第162卷
印刷ISSN0022-2291
电子ISSN1573-7357
文件大小520.30KB
发表时间2011-03
DOI10.1007/s10909-010-0247-7
页码661-668

发现好书期刊，享受阅读乐趣