Properties of purified direct steam grown silicon thermal oxides
- 作者Sebastian Mack; Andreas Wolf; Alexandra Walczak; Benjamin Thaidigsmann; Edgar Allan Wotke; Jeffrey J. Spiegelman; Ralf Preu; Daniel Biro
- 卷第95卷
- 期第9期
- 印刷ISSN0927-0248
- 文件大小927.01KB
- 发表时间2011
- DOI10.1016/j.solmat.2011.03.002
- 页码2570-2575