Dissociative Excitation of C2H2in the Electron Cyclotron Resonance Plasma of Ar: Production of CH(A2Δ) Radicals and Formation of Hydrogenated Amorphous Carbon Films

• 作者Haruhiko Ito; Katsuaki Koshimura; Saori Onitsuka; Kohtaro Okada; Tsuneo Suzuki; Hiroki Akasaka; Hidetoshi Saitoh
• 卷第32卷
• 期第2期
• 印刷ISSN0272-4324
• 电子ISSN1572-8986
• 文件大小729.58KB
• 发表时间2012-04
• DOI10.1007/s11090-012-9355-2
• 页码231-248