SiC epitaxy growth using chloride-based CVD

Anne Henry; Stefano Leone; Franziska C. Beyer; Henrik Pedersen; Olof Kordina; Sven Andersson; Erik Janzén

作者Anne Henry; Stefano Leone; Franziska C. Beyer; Henrik Pedersen; Olof Kordina; Sven Andersson; Erik Janzén
卷第407卷
期第10期
印刷ISSN0921-4526
文件大小474.78KB
发表时间2012
DOI10.1016/j.physb.2011.09.063
页码1467-1471

发现好书期刊，享受阅读乐趣