Structural, electrical and optical properties of indium tin oxide thin films prepared by RF sputtering using different density ceramic targets

• 作者Wei Zhang; Guisheng Zhu; Li Zhi; Huijuan Yang; Zupei Yang; Aibing Yu; Huarui Xu
• 卷第86卷
• 期第8期
• 印刷ISSN0042-207X
• 文件大小432.86KB
• 发表时间2012
• DOI10.1016/j.vacuum.2011.11.008
• 页码1045-1047