PZT-Based Piezoelectric MEMS Technology

Gabriel L. Smith; Jeffrey S. Pulskamp; Luz M. Sanchez; Daniel M. Potrepka; Robert M. Proie; Tony G. Ivanov; Ryan Q. Rudy; William D. Nothwang; Sarah S. Bedair; Christopher D. Meyer; Ronald G. Polcawich

作者Gabriel L. Smith; Jeffrey S. Pulskamp; Luz M. Sanchez; Daniel M. Potrepka; Robert M. Proie; Tony G. Ivanov; Ryan Q. Rudy; William D. Nothwang; Sarah S. Bedair; Christopher D. Meyer; Ronald G. Polcawich
卷第95卷
期第6期
印刷ISSN0002-7820
电子ISSN1551-2916
文件大小3928.78KB
发表时间2012
DOI10.1111/j.1551-2916.2012.05155.x

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PZT-Based Piezoelectric MEMS Technology