Very hard TiN thin films grown by pulsed laser deposition

D. Craciun; N. Stefan; G. Socol; G. Dorcioman; E. McCumiskey; M. Hanna; C.R. Taylor; G. Bourne; E. Lambers; K. Siebein; V. Craciun

作者D. Craciun; N. Stefan; G. Socol; G. Dorcioman; E. McCumiskey; M. Hanna; C.R. Taylor; G. Bourne; E. Lambers; K. Siebein; V. Craciun
卷第260卷
印刷ISSN0169-4332
文件大小798.55KB
发表时间2012
DOI10.1016/j.apsusc.2011.11.128

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