A novel high-power pulse PECVD method
- 作者Henrik Pedersen; Petter Larsson; Asim Aijaz; Jens Jensen; Daniel Lundin
- 卷第206卷
- 期第22期
- 印刷ISSN0257-8972
- 文件大小871.58KB
- 发表时间2012
- DOI10.1016/j.surfcoat.2012.05.007
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