Characterization of β-Ga2O3 thin films on sapphire (0001) using metal-organic chemical vapor deposition technique
- 作者Yu Lv; Jin Ma; Wei Mi; Caina Luan; Zhen Zhu; Hongdi Xiao
- 卷第86卷
- 期第12期
- 印刷ISSN0042-207X
- 文件大小1304.08KB
- 发表时间2012
- DOI10.1016/j.vacuum.2012.04.019
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