[IEEE 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Kyoto, Japan (2012.03.5-2012.03.8)] 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Analysis of air damping in micromachined resonators
- 作者Wu, Guoqiang; Xu, Dehui; Xiong, Bin; Ma, Yinglei; Wang, Yuelin; Jing, Errong
- 文件大小722.76KB
- 发表时间2012
- DOI10.1109/nems.2012.6196819
- 页码469-472
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