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[Lecture Notes in Computer Science] Algorithms and Architectures for Parallel Processing Volume 7439 || Optimization of a Short-Range Proximity Effect Correction Algorithm in E-Beam Lithography Using GPGPUs

Xiang, Yang; Stojmenovic, Ivan; Apduhan, Bernady O.; Wang, Guojun; Nakano, Koji; Zomaya, Albert

作者Xiang, Yang; Stojmenovic, Ivan; Apduhan, Bernady O.; Wang, Guojun; Nakano, Koji; Zomaya, Albert
文件大小273.80KB
发表时间2012
DOI10.1007/978-3-642-33078-0_4
页码41-55