Scan nonlinearity of a scanning electron microscope

V. V. Alzoba, V. P. Gavrilenko, A. Yu. Kuzin, V. B. Mityukhlyaev, A. V. Rakov, P. A. Todua, M. N. Filippov

作者V. V. Alzoba, V. P. Gavrilenko, A. Yu. Kuzin, V. B. Mityukhlyaev, A. V. Rakov, P. A. Todua, M. N. Filippov
卷第55卷
期第9期
文件大小223.37KB
发表时间2012-12
DOI10.1007/s11018-012-0089-6
页码1001-1004

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