A study of field emission process in electrostatically actuated MEMS switches
- 作者L. Michalas; A. Garg; A. Venkattraman; M. Koutsoureli; A. Alexeenko; D. Peroulis; G. Papaioannou
- 卷第52卷
- 文件大小437.66KB
- 发表时间2012
- DOI10.1016/j.microrel.2012.06.019
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