[IEEE 2012 3rd IEEE International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D) - Tokyo, Japan (2012.05.22-2012.05.23)] 2012 3rd IEEE International Workshop on Low Temperature Bonding for 3D Integration - Low temperature plasma activated direct wafer bonding
Plach, T.; Hingerl, K.; Dragoi, V.; Wimplinger, M.
- 作者Plach, T.; Hingerl, K.; Dragoi, V.; Wimplinger, M.
- 文件大小634.40KB
- 发表时间2012
- DOI10.1109/LTB-3D.2012.6238072
- 页码145-145