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A novel sandwich capacitive accelerometer with a symmetrical structure fabricated from a D-SOI wafer

A novel sandwich capacitive accelerometer with a symmetrical structure fabricated from a D-SOI wafer

Zhou, Xiaofeng; Che, Lufeng; Wu, Jian; Li, Xiaolin; Wang, Yuelin

期刊名称Journal of Micromechanics and Microengineering
作者Zhou, Xiaofeng; Che, Lufeng; Wu, Jian; Li, Xiaolin; Wang, Yuelin
卷第22卷
期第8期
印刷ISSN0960-1317
电子ISSN1361-6439
文件大小1932.06KB
发表时间2012-08-01
DOI10.1088/0960-1317/22/8/085031

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