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[IEEE 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - Paris, France (2012.01.29-2012.02.2)] 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - A 50 nm-wide 5 μm-deep copper vertical gap formation method by a gap-narrowing post-process with Supercritical Fluid Deposition for Pirani gauge operating over atmospheric pressure

[IEEE 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - Paris, France (2012.01.29-2012.02.2)] 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - A 50 nm-wide 5 μm-deep copper vertical gap formation method by a gap-narrowing post-process with Supercritical Fluid Deposition for Pirani gauge operating over atmospheric pressure

Kubota, Masanori; Mita, Yoshio; Momose, Takeshi; Kondo, Aiko; Shimogaki, Yukihiro; Nakano, Yoshiaki; Sugiyama, Masakazu
  • 作者Kubota, Masanori; Mita, Yoshio; Momose, Takeshi; Kondo, Aiko; Shimogaki, Yukihiro; Nakano, Yoshiaki; Sugiyama, Masakazu
  • 文件大小3543.44KB
  • 发表时间2012
  • DOI10.1109/MEMSYS.2012.6170126
  • 页码204-207
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